High resolution piezoelectric actuator for STM.
نویسندگان
چکیده
منابع مشابه
LEAD-FREE BNKT PIEZOELECTRIC ACTUATOR
An actuator is a device that converts input energy into mechanical energy. According to various types of input energy, various actuators have been advanced. Displacement in the electromagnetic, hydraulic and pneumatic actuators achieve by moving a piston via electromagnetic force or pressure, however the piezoelectric actuator (piezoceramic plates) displace directly. Therefore, accuracy and spe...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1988
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.54.817